http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09219427-A

Outgoing Links

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filingDate 1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75e2eba8945d87aa2074bf06dcf3f748
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publicationDate 1997-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H09219427-A
titleOfInvention Electron beam inspection equipment
abstract (57) [Abstract] [PROBLEMS] To detect a minute defect portion of about 0.1 μm of a sample corresponding to a minute spot diameter of an electron beam. SOLUTION: A field emission cathode 11, an irradiation means, an image detection means, a storage means 31 for storing information of a sample 32, and the information and a secondary charged particle image obtained by the image detection means are compared. And a outputting means 29 for outputting the result of comparison by the comparing means 30.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7205559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000003142-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7598471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010017173-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7242015-B2
priorityDate 1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 26.