| abstract |
(57) [Abstract] [PROBLEMS] To easily confirm the reliability of data obtained by an inspection device. SOLUTION: The same measurement target is obtained by measuring with a plurality of inspection devices including a first inspection device and a second inspection device, A data check device that receives measurement data of a plurality of measurement items including a first measurement item and a second measurement item, and mutually checks the measurement data of the plurality of measurement items, showing a correlation between the plurality of measurement items. Input means for inputting the correlation data in advance, storage means for storing the input correlation data, determination means for determining whether or not the received measurement data matches the correlation data, and output the determination result of the determination means It is a data check device provided with an output means for performing. |