| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cad01c23e939d84640b862cb28b5ff1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a735b3c35f02e6dbab3a009985796a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2daae45440f997452ad54273d371a27d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75e2eba8945d87aa2074bf06dcf3f748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d6010c023fb4f7448fc18bf417e0792 |
| publicationDate |
1997-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H09218171-A |
| titleOfInvention |
Defect inspection method |
| abstract |
(57) Abstract: A fine defect spot of about 0.1 μm of a sample corresponding to a small spot diameter of an electron beam is also detected. A sample 32 is scanned and irradiated with an electron beam generated from a field emission cathode 11 with an energy smaller than 1 keV, and secondary charged particles generated from the sample 32 are detected to detect defects in the sample 32. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014057918-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014078458-A |
| priorityDate |
1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |