http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09199490-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 1996-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8745cbb74cd1de50b52b075f832df7af |
| publicationDate | 1997-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09199490-A |
| titleOfInvention | Method for forming interlayer insulating film |
| abstract | (57) Abstract: An inorganic insulating film is formed on an organic insulating film while preventing the generation and decomposition of cracks in the organic insulating film. An insulating film can be formed. SOLUTION: A first inorganic insulating film 3 is formed on an organic insulating film 2 formed on a substrate 1 by a thermal CVD method in which thermal energy is applied to cause a chemical reaction, and then a first inorganic insulating film 3 is formed by a plasma CVD method. A second inorganic insulating film 4 is formed on the film 3. Then, the above-mentioned thermal CVD method is carried out by using a source gas containing at least a silane-based gas and an oxidative gas, and -50 It is performed within a temperature range of ℃ to 400 ℃. Prior to forming the first inorganic insulating film 2, the organic insulating film 2 formed on the substrate 1 is irradiated with plasma of an inert gas, or the organic insulating film 2 is formed. An alcohol solvent may be applied to the surface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11243177-A |
| priorityDate | 1996-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.