http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09185165-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3af3390937c06df72b00e23a42cf63ef |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12 |
| filingDate | 1996-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91972bd61e5ec07fe52f2ceb7c226fbd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f568e1db5e64df3936e50a9fae0a6ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb971a92b151c7fda0065e031d815b4 |
| publicationDate | 1997-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09185165-A |
| titleOfInvention | Acid-labile photochemically active composition |
| abstract | (57) Abstract: It is an object of the present invention to provide an improved means for preventing the formation of particles in a positive photoresist composition containing an alkali-soluble polymer and a photochemically active compound. To do. The present invention is a photoresist coating composition comprising an alkali-soluble resin dissolved in a solvent and a photochemically active compound, wherein the photochemically active compound is a polyhydric alcohol, and the first part of the hydroxyl group thereof. Is esterified with a halide of o-quinonediazide sulfonic acid, and the second part of the hydroxyl group is an acid labile group, and when contacted with an acid, the protective group is released to give a free hydroxyl group. It was protected by. |
| priorityDate | 1995-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 217.