http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09169594-A

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filingDate 1996-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ce0526fd55f32ba77d5fadd5c8a1323
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publicationDate 1997-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H09169594-A
titleOfInvention Method for producing diamond film with uniform film thickness distribution and diamond window produced by this method
abstract (57) Abstract: An almost uniform transmission of electromagnetic radiation over the entire radial direction is obtained with an increased burst strength of a diamond window, and at the same time it is possible to use a conventional reactor for producing said diamond film. A method of manufacturing a diamond window having a uniform film thickness distribution is provided. According to a method known per se, a diamond film having a non-uniform film thickness distribution deposited from the gas phase on a substrate is covered with a mask at a location where the film thickness is large and then A method for producing a diamond film having a uniform film thickness distribution, which comprises thickening only an area of the film not covered by further depositing diamond crystals.
priorityDate 1995-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 23.