http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09167831-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 |
| filingDate | 1995-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5e21e76361388a46494f534db7bbdb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2130f53fa73b2dce90a2aec7104addf1 |
| publicationDate | 1997-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09167831-A |
| titleOfInvention | Semiconductor memory device and method of manufacturing the same |
| abstract | In a DRAM having stacked and COB type memory cells, the surface ratio of storage node electrodes contributing to capacitors is increased. A storage node electrode is connected to a contact plug 117A via an upper node contact hole. N-type silicon film 123 and N The lower cell plate electrode composed of the lower silicon plate spacer 126 is covered with the storage node electrode 134 through the titanium oxide film 129a which is the lower capacitor insulating film, and is connected to the lower cell plate electrode. The upper cell plate electrode composed of 5 covers the storage node electrode 134 via the titanium oxide film 139 which is the upper capacitance insulating film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1003206-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1003206-A3 |
| priorityDate | 1995-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.