http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H091487-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd2e32a459e3e913d0855f8456c59714 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
filingDate | 1995-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_897468dc6abc66e94a982cfe558bc31f |
publicationDate | 1997-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H091487-A |
titleOfInvention | Vacuum gripper and IC test handler |
abstract | (57) [Summary] [Purpose] Achieves high durability and is -40 ° C to -55 ° C. Provide a vacuum gripping device that can be used at low temperatures. The vacuum gripping device 20 includes a bearing member 22 having a bolt portion 22a to be mounted on the apparatus main body side, and a movable intake air that is flexibly supported in the axial direction via a first O-ring 23. Nozzle shaft 24 and the second fitted to this Is provided with a stainless steel suction pad 26 holding the O-ring 25 on the inner peripheral surface thereof, and the suction surface 26b is set so as to protrude from the nozzle opening 24d by a gap length L which is about a suction displacement amount. The swinging motion of the intake nozzle shaft 24 and the elastic deformation of the second O-ring 25 that is synergistic with the suction motion of the suction nozzle shaft 26 allow the swinging motion with some degree of elastic restoring force. Therefore, it is possible to exhibit the adherability to the attracted surface from various directions. In addition, the amount of suction displacement after suction is determined by the suction nozzle shaft 24 and the second O-ring 25. Since it is the sum of the axial displacement amounts of the above, it is possible to draw the suction target object 30 by about the gap length L. Suction pad 26 It can be composed of metal parts. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110391169-A |
priorityDate | 1995-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581 |
Total number of triples: 16.