| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 |
| filingDate |
1995-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a6b5948b42217d1d4fccf224b837ec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8180d99e11857410fcdb989e6939cfc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7a6c8213215e2f437fa22bcac0c5f48 |
| publicationDate |
1997-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H09129827-A |
| titleOfInvention |
Ferroelectric capacitor |
| abstract |
(57) 【Abstract】 PROBLEM TO BE SOLVED: To improve the adhesion between a metal electrode containing platinum and an electrode formation surface thereof, and to solve problems such as film peeling and component element diffusion. A ZrO film is formed on a surface of a ferroelectric capacitor. Ferroelectric capacitor 2 in which a metal electrode layer 8 containing platinum is formed as a capacitor electrode via a two- layer 21 Make up 2. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100362198-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013207001-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100379547-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100333645-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100269320-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990010194-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2645437-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2645437-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9254651-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7535157-B2 |
| priorityDate |
1995-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |