abstract |
(57) Abstract: In a conventional hard carbon film-coated wear resistant member, the base is expensive, and the adhesion strength of the hard carbon film to the base is low, Moreover, the slidability was also insufficient. An austenitic stainless steel containing Fe, Cr and Ni is used as a substrate, and the hard carbon film is coated on the surface of the substrate through an intermediate layer containing at least diamond and metal carbide. It has been found that by setting the surface roughness (Rmax) of 2 μm or less, excellent adhesion and wear resistance can be achieved as a wear resistant member. Further, the intermediate layer contains silicon carbide as a metal carbide, and further, in a Raman spectroscopic spectrum analysis of the hard carbon film, 1160 ± 40 c It is characterized by the presence of a peak at m -1 . |