http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09116136-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66954 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-339 |
| filingDate | 1996-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae602848327b9966f1d25b2cee9386d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dda9d1365629fd14f47a1ea1baf6343e |
| publicationDate | 1997-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09116136-A |
| titleOfInvention | Method for manufacturing a charge coupled device having an end-aligned implant and an electrode connected to a metal of a cover |
| abstract | Kind Code: A1 Abstract: An improved method of making a two-phase CCD device with improved conductivity between clocked CCD phases and improved control of unwanted light in a CCD shift register. provide. SOLUTION: Ions of the first or second conductivity type are further implanted in the region between the first conductive strips 30a, and then electrically separated from the first conductive strips by the first insulating layer. Uniformly depositing a second conductive layer 40 isolated on the substrate and then closely spaced to form alternating coplanar first 30a and second 40a electrically isolated conductive strips. Globally removing by uniformly planarizing those portions of the second conductive layer that are disposed over the area of the first conductive strip, then depositing a second insulating layer, The adjacent first and second conductive strips selected to form the first and second composite electrodes are then electrically connected together, and then the selected composite gate electrodes are planarized together. Each step consists of further connecting with a metal conductor. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007081140-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008277787-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010105209-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007081139-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7880787-B2 |
| priorityDate | 1995-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.