| abstract |
(57) Abstract: When a thin film of calcium or a substance containing calcium useful for a superconducting material or an EL material is manufactured by a CVD method, a raw material compound that can be evaporated in a liquid state is obtained, and operability is improved. A good quality thin film is produced. A calcium source material for CVD used to deposit calcium or a calcium-containing material by a CVD method, wherein 6-ethyl-2,2-dimethyl-3,5-octanedione is coordinated with calcium. A calcium source material for CVD comprising an organic calcium complex as a child. |