| abstract |
(57) Abstract: A method and apparatus for recovering at least one perfluoro compound gas from a gas mixture are provided. A glassy polymer membrane is provided that includes at least one perfluoro compound gas and at least one carrier gas, provides a gas mixture at a predetermined pressure, and has a feed side and a permeate side. Contacting the feed side of the membrane with the gas mixture, and substantially from the feed side of the membrane, the at least one perfluoro compound gas as an unpermeate stream at a pressure substantially equal to the predetermined pressure. The entrained enriched gas is withdrawn and the permeate side of the membrane is withdrawn as a permeate stream, a depleted gas mixture consisting essentially of the at least one carrier gas. |