http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0892749-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G55-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
| filingDate | 1994-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5378cc3ec5695d3b83c3cff4aaf01deb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a6b5948b42217d1d4fccf224b837ec4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7a6c8213215e2f437fa22bcac0c5f48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_850502c63296237f9513a9e3a820d6a1 |
| publicationDate | 1996-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0892749-A |
| titleOfInvention | Method for producing ruthenium oxide thin film |
| abstract | (57) [Summary] [Objective] A method for producing a ruthenium oxide thin film, which is capable of producing a single-phase ruthenium oxide thin film by an inexpensive and simple method, and which is capable of producing a ruthenium oxide thin film having excellent electric characteristics. provide. [Structure] A mass of ruthenium chloride, which is a raw material, is crushed into a powder and then dissolved in ethanol as a solvent to prepare a precursor sol solution. The precursor sol solution has a pore size of 0.5. After passing through a filter having a size of not more than μm, it is applied to the substrate and heat-treated. The heat treatment temperature is 600 ° C to 900 ° C. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100577698-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100970575-B1 |
| priorityDate | 1994-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.