http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0888194-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4af0df9a26ff4aafde7285cbd8eb12f4
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223
filingDate 1994-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6aae7ce3522de748646c63df675a3915
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publicationDate 1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H0888194-A
titleOfInvention Heat treatment container
abstract (57) [Summary] [Purpose] To provide a heat treatment container capable of easily and reproducibly defining the inner volume. [Features] A feature of the present invention is that an outer tube 1 that constitutes a container main body that encloses an object to be treated 5 and an outer tube 1 that is inserted into the outer tube 1 and that has a tip up to a predetermined position of the tip of the outer tube. It is provided with a spacer 6 formed of a plate-shaped member that reaches the inner pipe 7 and an inner pipe 7 that is inserted into contact with the inner wall of the other end of the outer pipe and contacts the other end of the spacer.
priorityDate 1994-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 21.