http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0888194-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4af0df9a26ff4aafde7285cbd8eb12f4 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223 |
filingDate | 1994-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6aae7ce3522de748646c63df675a3915 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abd4a94e34c0a7f75a79febb40e7f7da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b92cf3a50852bb34da5a9f3c2b2691e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7218fd76d7118547a76ab1b633ff1da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d08eacb28535d6f633bda9b79eb6088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e05727aefd4c4e1297983c2dec69e56d |
publicationDate | 1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H0888194-A |
titleOfInvention | Heat treatment container |
abstract | (57) [Summary] [Purpose] To provide a heat treatment container capable of easily and reproducibly defining the inner volume. [Features] A feature of the present invention is that an outer tube 1 that constitutes a container main body that encloses an object to be treated 5 and an outer tube 1 that is inserted into the outer tube 1 and that has a tip up to a predetermined position of the tip of the outer tube. It is provided with a spacer 6 formed of a plate-shaped member that reaches the inner pipe 7 and an inner pipe 7 that is inserted into contact with the inner wall of the other end of the outer pipe and contacts the other end of the spacer. |
priorityDate | 1994-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.