http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0887959-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-3042 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-30 |
| filingDate | 1995-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e33f32e68692145e7ef0fd89ed20694 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c57937eb0b175a0388b70198f884c950 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46f58f9367a56cf5e20f56fbf232ae9b |
| publicationDate | 1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0887959-A |
| titleOfInvention | Method of manufacturing microchip for electron source and microchip for electron source obtained by this method |
| abstract | (57) [Abstract] [Objective] A method for manufacturing a microchip for an electron source capable of improving the characteristics of a cathode of the microchip and the uniformity on a large surface, and a microchip for an electron source obtained by using the method. Aim to get chips. A method of manufacturing the electron source according to the present invention includes a system of a cathode conductor (8), a grid (10a) placed on an intermediate insulator 23, and a microchip () deposited on the cathode conductor. 18) and the grid has a lower surface (I) Is located geometrically between the upper surface (S) and the upper surface (S), and is characterized in that the microchip is subjected to a first cleaning step, followed by a finishing or improving step by surface etching. The microchip of the present application consists of two parts. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002521802-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008041460-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100387053-B1 |
| priorityDate | 1994-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.