http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0882927-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 |
| filingDate | 1994-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20881166c015754eb567ef04b86c2daf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fcbf945a793947a065d2edf522fbffe |
| publicationDate | 1996-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0882927-A |
| titleOfInvention | Negative photoresist resin composition |
| abstract | (57) [Summary] (Modified) [Objective] To provide a negative photoresist composition having high resolution, developability in a dilute alkaline aqueous solution, and particularly high sensitivity and excellent photoresist characteristics. [Structure] (1) General formula (I) [In the formula, the average number of repetitions n takes a value of 0 or more and 20 or less. R 1 and R 2 each independently represent a hydrogen atom, a halogen atom, an alkyl group or the like. Q is independently, -OH or the general formula (II) -OROCH = CH 2 (In the formula, R represents an alkylene group containing 1 to 12 carbon atoms.). A has 1 to 1 carbon atoms Shows 30 divalent hydrocarbons. ] A photopolymerizable monomer having a vinyloxyalkyl group represented by: (2) General formula (III) A negative photoresist resin composition comprising a triazine compound represented by: and (3) a solvent as essential components. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005083521-A1 |
| priorityDate | 1994-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 129.