| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
1994-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51c34915a8e6032ea3aefd557e214970
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_494eb1f26f24f28603baea9e16ea9827 |
| publicationDate |
1996-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H088181-A |
| titleOfInvention |
Semiconductor device and manufacturing method thereof |
| abstract |
(57) [Summary] [Purpose] To improve reliability and electrical stability. [Structure] Active region 1 made of crystalline silicon film A semiconductor device including the active region 113 Is composed of a lateral growth portion formed by heat-treating an amorphous silicon film into which a catalytic element that promotes crystallization is selectively introduced, and the amorphous portion is formed before irradiation with laser light or intense light. For introducing the catalytic element into the porous silicon film 1 This is a configuration in which 05 is removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1052700-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8026518-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7696514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6909115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7330234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7569433-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6680487-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7391055-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7173281-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759681-B2 |
| priorityDate |
1994-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |