http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0878336-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1994-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2edbeac6d35df6ad63078cfb495d35cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adab5f9b081d1ae02057fce2a5396307 |
| publicationDate | 1996-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0878336-A |
| titleOfInvention | Reaction processor |
| abstract | (57) [Summary] (Modified) [Purpose] A uniform and uniform thin film is formed on the surface of the crystal substrate in the reaction chamber by uniformly mixing the source gases in the mixed gas supply pipe that supplies the mixed gas into the reaction chamber. To do. [Structure] A plurality of specific gas supply pipes 9 for supplying a specific gas are connected to a mixed gas supply pipe 7 for supplying a plurality of source gases in a mixed state to a reaction chamber 1 accommodating a crystal substrate. Further, a plurality of mixing plates 25 are arranged at predetermined intervals in the mixed gas supply pipe between the specific gas supply pipe from the reaction chamber and the reaction chamber. Each mixing plate is provided with a plurality of slits 26, and the extending directions of the slits are different between adjacent mixing plates, so that the raw material gas is mixed. In the specific gas supply pipe, a gas having a large molecular weight is supplied on the upstream side, and a gas having a small molecular weight is supplied toward the downstream side, so that the raw material gas is further homogenized. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11152573-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011192727-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009122790-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005509093-A |
| priorityDate | 1994-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.