abstract |
(57) [Summary] [Structure] A ceramic heater having a volume resistivity value of 10 −4 to 10 Ω · cm is formed into a meandering or spiral ring body 2, and electrode lead-out portions are formed at both ends thereof to form a ceramic heater 1. Configure. [Effect] Since no thermal deformation occurs, uniform heating can be performed for a long time, and the resistance value can be freely adjusted by changing the size of the groove 4 and the like. |