| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-55 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F22-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D207-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D405-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate |
1994-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79f20656a68ae44df9da14ab6f2579a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1c36bcf936f3aaa0bee708426d7e563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_233bb3192a32691acf2ff9f4ebb3fbb7 |
| publicationDate |
1996-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0873428-A |
| titleOfInvention |
Maleimide monomer and its (co) polymer and resin composition |
| abstract |
(57) [Summary] [Purpose] It is an object to provide a chemically amplified photosensitive resin composition which gives a relief pattern having excellent heat resistance and a raw material thereof. [Structure] A resin composition containing a maleimide monomer and a (co) polymer thereof, in which a hydroxyl group of hydroxyphenylmaleimide is eliminated by an acid catalyst to newly protect the hydroxyl group with a functional group. [Effect] It is possible to obtain a relief pattern having excellent heat resistance from a highly sensitive chemically amplified photosensitive resin composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007328333-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2314846-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112457628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6017676-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113685441-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113685441-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2314846-B |
| priorityDate |
1994-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |