http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H086252-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1994-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a58af3ea1f75786f00d1bb131a94ded6 |
| publicationDate | 1996-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H086252-A |
| titleOfInvention | Photosensitive resin composition |
| abstract | (57) [Abstract] [Purpose] Transparent to the oscillation wavelength region of ultrashort wavelength light such as ArF excimer laser, and photosensitive material (photoacid generator etc.) By designing the photosensitive group to be introduced and the photosensitive group to be introduced, it is configured to have sensitivity (absorption) at a longer wavelength, and g line, i line, Kr Provided is a photosensitive resin composition which can be used for F excimer laser and is suitable for microfabrication and is versatile. [Structure] A base resin having a structure in which a cellulose resin is crosslinked with an acetal or ketal skeleton, Contains a photo acid generator. The cellulose resin has a structure crosslinked by an acetal or ketal skeleton, and the crosslinked site has a photoacid generating function. A resin in which a cellulose resin is crosslinked by an acetal or ketal skeleton and a group having a photoacid generating function is introduced into a portion other than the crosslinked portion. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0848290-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1211559-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9389451-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7135209-B2 |
| priorityDate | 1994-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.