| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2030-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2030-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-1097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-06 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-00 |
| filingDate |
1995-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dd79ca2a52e727cb8df75288a4f3955 |
| publicationDate |
1996-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0854380-A |
| titleOfInvention |
Gas analyzer, analysis method thereof, and gas sampling device |
| abstract |
(57) [Summary] [Structure] The absorption liquid flow path switching valve 17 and the sample introduction valve 11 are set to non-circulation flow paths, and the sample gas is introduced into the inner tube of the diffusion scrubber 1 having the gas permeable membrane tube in the inner tube. , Pass the absorbing liquid that absorbs the sample gas through the gap between the outer tube and the inner tube, Equilibrate the gas component and the absorbing liquid. After equilibration, valve 1 7 and 11 are switched to the circulation channel, and the absorption liquid that has absorbed the gas component is passed through the concentration column 14 to adsorb and concentrate the analysis component. Switch the valves 17 and 11 to the non-circulating flow path again, The concentrated component is eluted and quantified by the ion chromatograph 30. By repeating the above operation, measurement is performed at predetermined time intervals. [Effect] Since the analytical component is adsorbed and concentrated in the circulation channel, the lower limit of detection can be lowered, and the volatile impurity component in the cleaning atmosphere can be measured with high sensitivity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100475644-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1667784-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013156046-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6470760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6033459-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105158422-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010078280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105158422-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005147950-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5841022-A |
| priorityDate |
1994-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |