http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0851139-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b13ecff98ff62e7b4bc5bd65edb6089 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 1995-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0087161938e94f7e956cdb9befbead40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a869c9a91f89d3191b908b217711e46c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e525fc1f4e302bb0b4949fc0c69c3e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c037334d6b4b86bf64be735161ab6b1 |
| publicationDate | 1996-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0851139-A |
| titleOfInvention | Processing equipment |
| abstract | (57) Abstract: It is possible to flexibly cope with an increase in the size of a transfer jig such as a wafer cassette and automatic transfer, and to suppress the amount of dust adhering to an object to be processed and to improve throughput. There is provided a processing device capable of improving the above. A processing unit (2) having a plurality of processing units (11a to 11f) and a transfer path unit (12) for loading and unloading a semiconductor wafer (10) into and from the processing units (11a to 11f), and a cassette mounting unit for housing a wafer cassette (13). 14 and a transfer mechanism 15 for carrying the semiconductor wafer 10 in and out of the wafer cassette 13 And a transfer mechanism 16 that transfers the semiconductor wafer 10 between the transfer path unit 12 and the transfer mechanism 15, and the transfer path unit 12 and the transfer mechanism 15 are arranged in a T shape. |
| priorityDate | 1990-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID96563 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415799293 |
Total number of triples: 19.