| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-51 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
1994-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1996-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08507175-A |
| titleOfInvention |
Semiconductor device containing deuterium atoms |
| abstract |
(57) Summary A method is provided for contacting a silicon wafer with a deuterium-containing material to form Si-D and Si-OD bonds on a silicon surface at an interface with a silicon dioxide layer. MOS devices are formed by using deuterium-containing compounds in various steps of the fabrication procedure. After the MOS gate oxide is formed, the wafer is annealed in a deuterium containing atmosphere and a polysilicon layer is formed by chemical vapor deposition using a deuterium containing compound. The device is then rinsed with deuterium containing compounds such as D 2 O, D 2 SO 4 and DCl. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7592190-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6208002-B1 |
| priorityDate |
1993-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |