| abstract |
(57) [Summary] The present invention relates to a sulfonic acid ester and a compound prepared by using the compound, which forms a strong acid upon irradiation, b) C-O-C or C decomposable by at least one acid. A compound having a —O—Si bond (for a positive type mixture) or a compound having at least a group capable of being cross-linked by an acid (for a negative type mixture), and c) insoluble in water but soluble in an alkaline aqueous solution? , Or at least a binder that is wettable, the compound a) having the formula [R 1 CR 2 (CF 3 ) —O—SO 2 —] n R 3 or R 1 [—CR 2 (CF 3 ) —O. a sulfonic acid ester of -SO 2 -R 3] m, about positive or radiation-sensitive mixture of the negative. This mixture shows significantly higher sensitivity and excellent resolution in the DUV range. It is particularly advantageous that this mixture does not change during the holding period between exposure and post-heating. |