http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0849075-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
filingDate 1994-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ea4bac82497c2edaf8e93fe580c376c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c1d13d58bbfeadca5336451b4468ca0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5759fe6045febe69080fe31b8fc49b6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_079bfc31952e2709ea15515137ccc103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77afe987e4311b0700455fc16d92cfca
publicationDate 1996-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H0849075-A
titleOfInvention Film forming equipment
abstract (57) [Abstract] [Purpose] An object of the present invention is to provide a metal thin film body such as a magnetic recording medium with a high manufacturing yield at a low cost. A film forming apparatus for providing a metal thin film by depositing and depositing flying metal particles on a support, comprising: a vacuum chamber, a support winding means, a support supply means, and a support. A film forming apparatus comprising: a roll arranged in the vacuum chamber, which guides a support body that travels between the winding means and the supplying means, and a sliding contact means that slides along the roll.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110438467-A
priorityDate 1994-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
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Total number of triples: 20.