Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-01 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-01 |
filingDate |
1995-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8b2eccd6e9709f9773d8ac1da890d38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4d13e23fa0cf58484cbfae7ac99254e |
publicationDate |
1996-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-H0848596-A |
titleOfInvention |
CVD diamond composed of pure isotopes |
abstract |
(57) [Summary] [Purpose] At least 100 microns thick and about 20W. / Cm ยท K Optically transparent C with higher thermal conductivity A method for producing a VD diamond film. The method of the present invention employs a gas mixture containing hydrogen and a carbon source enriched for a particular isotope as a substrate for a time sufficient to deposit a diamond film having a thickness greater than about 50 microns. It is characterized by flowing along. |
priorityDate |
1994-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |