| abstract |
(57) [Abstract] [Purpose] It has a low refractive index suitable as a surface anti-reflective coating for photoresists and is removable by an aqueous medium. Further, the present invention provides a composition for forming a surface antireflection film, in which no foreign matter is generated in the coating film and a residue after development is extremely small. In a surface antireflection coating composition containing a water-soluble fluorine compound and water, the water-soluble fluorine compound is a fluorinated alkyl polyether sulfonic acid and its non-metallic salt, and a fluorinated alkyl polyether carboxylic acid and its A surface antireflection coating composition containing one or more compounds selected from the group consisting of non-metallic salts. |