http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08334461-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f793ebf7214d03d5e3f9ccd12bc56ffb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 1995-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87c04e20cf480f88fe0b9f04dbbc1864 |
| publicationDate | 1996-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08334461-A |
| titleOfInvention | Method for measuring composition of buffered hydrofluoric acid for semiconductor wafer etching |
| abstract | (57) [Summary] [Object] To provide a method for measuring the composition of buffered hydrofluoric acid, which enables the compositional fraction of buffered hydrofluoric acid to be measured in real time and is suitable for controlling the etching process. [Constitution] Ammonium fluoride concentration is 10 to 30 wt %, The physical property value and the refractive index which are proportional to the density of the buffered hydrofluoric acid for semiconductor wafer etching made of a mixed aqueous solution having a hydrogen fluoride concentration of 0.5 to 10 wt% are measured, and each component is based on the simultaneous equations of the present invention. The compositional fraction of was calculated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1172844-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6938626-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1172844-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7255749-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10139363-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6799589-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100870255-B1 |
| priorityDate | 1995-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.