http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08321528-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1995-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8969348f278d7f04e846b5e62cad994 |
| publicationDate | 1996-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08321528-A |
| titleOfInvention | Measuring method of semiconductor device |
| abstract | (57) [Abstract] [Purpose] To provide a semiconductor device testing method capable of shortening the measurement time of a wafer to be measured. [Structure] A prescribed number n sets of wafer elements to be tested are set (step 102), and full tests are sequentially executed on the wafer elements (step 10). 3) For each wafer element, it is checked whether or not the full test has been passed (step 104). When it is determined that the full set has been passed, the number X of non-defective products of the passed wafer elements is counted (step 1 05). In addition, the counting is not performed in the case of a wafer device that does not pass the full test. Number of non-defective wafer elements X It is determined whether or not the count value of n has reached the specified number n (step 106), and when the count value of the number X of non-defective wafer elements X has reached the specified number n, the wafer measurement ends. . |
| priorityDate | 1995-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451890432 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160304302 |
Total number of triples: 13.