| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
1996-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2c29f0c277574b198532257e2dfb768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e7b443cc4c2e47a4ec6bc5437b1d4d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e95027016d3006384868632b623978bb |
| publicationDate |
1996-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08316276-A |
| titleOfInvention |
Charge measuring device |
| abstract |
Apparatus for measuring charge in oxide on silicon substrate containing very dense product chips characterized by thick oxide, high substrate doping level in the field region. I will provide a. A specially configured extremely thin conductive probe 5 is pressed against an oxide layer 6 whose charge is to be measured. A bias is applied to the probe to bias the underlying silicon surface to overlap or reverse. The intensity-modulated light beam is focused on the contact point of the probe. The amplitude-modulated photovoltage is detected and input to the computer 10, and the value of the oxide charge is taken out from the computer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111856236-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111856236-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111751698-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111751698-A |
| priorityDate |
1995-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |