| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
1995-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a80d358369a3a91fdaab2f06adf08bbb |
| publicationDate |
1996-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08316143-A |
| titleOfInvention |
Semiconductor manufacturing method |
| abstract |
(57) [Summary] [Objective] To provide a process in which an amorphous silicon film can be processed at a temperature that a glass substrate can withstand. [Structure] An amorphous silicon film formed on a glass substrate by a vapor phase method is heated by microwave irradiation to obtain a crystalline silicon film. At this time, a metal element that promotes crystallization of silicon is brought into contact with and held by the amorphous silicon film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9924637-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100524874-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016086178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018133576-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017145261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256291-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100372753-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010138023-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8173484-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8759205-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I484653-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011181842-A |
| priorityDate |
1995-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |