http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08292561-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
filingDate 1995-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_691a7b774ed69ce1804cd13f9292586c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3984f80825a84ba340560bc61efb6fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d0d91b80f8f86a067d205ada365b9ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79c061adb7fd509cc072221106a78996
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cdae1f0b9abbcc7b3c1399b12b4d991
publicationDate 1996-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08292561-A
titleOfInvention Negative resist composition and method for producing resist image
abstract (57) [Summary] [Object] To provide a negative resist composition having high photosensitivity or radiation sensitivity and excellent resolution, and a method for producing a resist image using the same. [Structure] Alkaline aqueous solution soluble resin, bromomethyl aryl ketone or dibromomethyl aryl ketone, amino resin and the following general formula (I): [Wherein, X, Y and Z each independently represent an alkyl group, a hydrogen atom, a chlorine atom or a bromine atom] and a negative resist composition containing a phenol compound represented by the formula, and the composition is applied onto a substrate, A method for producing a resist image, which comprises, after drying, exposing or irradiating with actinic radiation, heating, and then developing with an aqueous alkali solution.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4655487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005226048-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11176750-A
priorityDate 1995-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6992806
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416015519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID260
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420605809
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416040268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420513935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421067976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3830513
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2749300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406907632
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID569483
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457192620
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12556130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474448
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451403919
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID614540
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450984731
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415763485
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12698905
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421054675
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416165977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426126020
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21265414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62705
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422917478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68237
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488200
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426005750

Total number of triples: 66.