http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08286000-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a76f7dc0859729fecfb03c4a311df86 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-00 |
| filingDate | 1995-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c140ba1df41d156b4d4cde09776fdbb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5da6be3b5dd34e70a8dcc1fccdfe029a |
| publicationDate | 1996-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08286000-A |
| titleOfInvention | Energy beam source |
| abstract | (57) 【Abstract】 PROBLEM TO BE SOLVED: To form a beam having various energy states or kinds from a single or a plurality of energy beam sources and perform various processing, and a fine beam source using the energy beam source. Provide a processing device. An energy beam source (10) including a discharge tube (11) and a gas supply nozzle (13) for supplying gas into the tube. A beam emission nozzle 12 having one or more beam emission holes, and three or more electrodes 1 arranged in the discharge tube 11. 5, 16 and 17, the type of voltage applied to the electrode is any combination of high-frequency voltage, DC voltage, and ground, and the combination of the type of voltage applied to the electrode and the gas type are changed. Then, a particle beam having different energy states or kinds such as positive ions, negative ions, fast neutral particles, radical particles, and electrons is supplied. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013253916-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012052909-A |
| priorityDate | 1995-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.