| abstract |
(57) Abstract: A method and a device for monitoring the change in the thickness of a film on a lower body in-situ and in real time in a non-contact manner. SOLUTION: By inducing an electric current in the film, a change in the thickness of the film on a lower body such as a semiconductor substrate is monitored in-situ, and as the thickness of the film changes (increases or decreases), the current changes. To detect. When using a conductive film, by generating an alternating electromagnetic field, A sensor containing a capacitor and an inductor that induces eddy currents in the film. |