http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0828341-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 1986-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1996-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0828341-B2 |
| titleOfInvention | Silicon wafer cleaning method |
| priorityDate | 1986-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.