http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08279463-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3593a13cc4ab7079f7a69ef885b5a005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B25-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 1995-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0594324edd93f959f92a1cd657208cc |
| publicationDate | 1996-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08279463-A |
| titleOfInvention | Vapor phase growth apparatus and method for removing reaction tube in vapor phase growth apparatus |
| abstract | (57) [Summary] [Purpose] A structure of a vapor phase growth apparatus and a method for removing the reaction tube that can prevent the ignition of the yellow phosphorus when removing the reaction tube to which the yellow phosphorus is attached by a simple procedure. provide. A cooling means such as a cooling coil 10 for cooling the gas flowing in the reaction tube 1 to a temperature of 0 ° C. or less is provided in the path for introducing the gas into the reaction tube 1. Alternatively, 0 in the reaction tube A low temperature gas introduction path for introducing a low temperature inert gas at a temperature of ℃ or less is provided. Before disassembling the vapor phase growth apparatus and removing the reaction tube 1, the inside of the reaction tube 1 is cooled to a temperature of 0 ° C. or lower, and then the reaction tube 1 is removed. |
| priorityDate | 1995-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.