http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08264612-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5198a2a21392d6cbc0bb4898b3fb3d29 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1995-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de7458a5656e9efd1c92e8bda440223b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7a1a5284e33c3fc2e807d9ac5e7de4a |
| publicationDate | 1996-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08264612-A |
| titleOfInvention | Silicon wafer evaluation method |
| abstract | (57) [Summary] [Object] To provide a method for simply and non-destructively evaluating a pn junction reverse bias leak current due to a decrease in information charge retention time of DRAM and a charge retention time defect rate of DRAM. [Structure] There is a correlation between the defect density measured by infrared interferometry and the pn junction leakage current amount, and the leakage current amount of an unknown silicon wafer is estimated by examining the correlation in advance. In addition, the defect rate of the charge retention time of the DRAM is similarly obtained by using the infrared interference method to obtain the correlation with the defect density, so that the defect rate can be estimated nondestructively without waiting for the end of the in-line process. To do. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107764832-A |
| priorityDate | 1995-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 19.