| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dcebf5a7f7ddc3b081f70e8ce1c4097 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00 |
| filingDate |
1995-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ca4d1e570113fa8a86fed719e84799b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46712ff5693b7b62c3af6b2e0533c35c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2997b47474691ea194e884dee3b8fc7 |
| publicationDate |
1996-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08260196-A |
| titleOfInvention |
Surface treatment method for vacuum chamber member made of Al or Al alloy |
| abstract |
(57) [Summary] [Objective] A method for surface treatment of a vacuum chamber member made of Al or Al alloy excellent in gas corrosion resistance and plasma resistance on the premise of adopting a cost-effective anodic oxidation treatment method. provide. A vacuum chamber member made of Al or Al alloy is formed by performing anodization treatment on a vacuum chamber member made of Al or Al alloy, thereby forming an anodic oxide film composed of a porous layer having a large number of pores opened on the surface and a barrier layer having no pores. In the surface treatment method for the chamber member, first, a porous anodizing treatment is performed, and then a non-porous anodizing treatment (anodizing treatment for growing a barrier layer without forming pores) is performed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008240024-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011181887-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6686053-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010095774-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012162769-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444304-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020007643-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6066392-A |
| priorityDate |
1995-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |