| abstract |
(57) [Abstract] (Modified) PROBLEM TO BE SOLVED: To provide a partially crosslinked polymer used as a binder resin for a photoresist. Formulas I and II: (R 1 and R 2 are H, methyl or halogen, and R 3 And R 4 are C 1 -C 6 alkyl, C 1 -C 6 alkoxy or halogen) structural repeating units, wherein 5 to 90% of the hydroxyl groups in the structural units of formulas I and II are present. Has the formula III: (R 5 is C 1 -C 6 alkyl, R 6 is H, C 1 ~C 6 alkyl, R 7 is C 1 -C 18 alkyl, C 5 -C 10 cycloalkyl, C 5 -C 14 aryl or C 6 ˜C 30 aralkyl) and the polymer chain is of formula IV, V or VI: Polymers having a M w of 5,000 to 1,000,000 consisting of structural units of 4 are suitable as binders for high process stability, high contrast and good resolution DUV photoresists. |