| abstract |
(57) [Summary] [Structure] A high crystal characterized by contacting a powder, wire or foil made of a transition metal or an alloy containing the transition metal as a main component with a thermal plasma flame to evaporate and condense the metal. Of the crystalline transition metal powder; and forming an internal electrode layer from the highly crystalline metal powder thus obtained, A method of manufacturing a monolithic ceramic capacitor, which comprises firing together with a dielectric layer. [Effect] A highly crystalline transition metal powder can be obtained without producing an acidic substance as a by-product. The obtained highly crystalline transition metal powder has little expansion / contraction due to oxidation / reduction in the process of heating. A multilayer ceramic capacitor using this as an internal electrode does not cause structural defects during firing. |