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filingDate 1995-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1996-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08220355-A
titleOfInvention Planar optical waveguide and manufacturing method thereof
abstract (57) [Summary] [Object] To provide a planar optical waveguide in which the anisotropy of the refractive index distribution is reduced. [Structure] A substrate 100 made of quartz glass having a purity of 99.99% or more, a clad portion 200 made of quartz glass containing 0.5% by weight or more of fluorine, formed on the substrate 100, and chlorine of 0.1% or less. Containing 1% by weight or more and substantially not containing impurities other than chlorine, the silica glass has a higher refractive index than the cladding portion 200, and is included in the cladding portion 200 except for the light incident end and the light emitting end. It is provided with the surrounded core part 300.
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