http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08217897-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
filingDate | 1995-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6796cafdfd81174f5651366102a7d0c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3283e80f267944e980991959fac76fe8 |
publicationDate | 1996-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H08217897-A |
titleOfInvention | Plasma surface treatment method and plastic surface treatment apparatus |
abstract | (57) [Abstract] [Purpose] By bringing discharge plasma into contact with the surface of a substrate in a gas atmosphere, (EN) Provided are a plasma surface treatment method and a plastic surface treatment apparatus capable of easily performing partial surface treatment of a substrate. A process formed by opposed upper and lower electrodes 2 and 3 arranged in a substantially horizontal direction, and solid dielectric walls 4a and 4b vertically provided around the upper and lower electrodes 2 and 3. The base material 6 is arranged in the space 11 so as to be substantially horizontal with respect to the upper and lower electrodes 2 and 3, and a mixed gas of an inert gas and a processing gas is introduced into the processing space 11 so as to be near atmospheric pressure. The surface of the base material 6 is treated by applying a voltage to the electrodes to generate discharge plasma under the pressure of 1, and bringing the discharge plasma into contact with the surface of the base material 6. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4620322-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007284649-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005095268-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7919141-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004076122-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006331736-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4516891-B2 |
priorityDate | 1995-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.