http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08213439-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5198a2a21392d6cbc0bb4898b3fb3d29 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1995-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b7480643c5a90df78e8bb4691398171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a813ff11e9d2457cb2b6983e25b95bd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac9ff8e7ab1ffaf33332680ceaeda4c8 |
| publicationDate | 1996-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08213439-A |
| titleOfInvention | Defect evaluation method for silicon substrate with insulating film |
| abstract | (57) [Summary] (Corrected) [Purpose] To evaluate pinhole defects in a silicon substrate with an insulating film quickly, easily, and accurately. [Structure] Copper is selectively deposited on a pinhole defect 3 of a silicon substrate 1 having an insulating film 2 by an electrochemical reaction, and this precipitation is visually observed to obtain a pinhole defect density. When depositing copper, 0.005 mol / l To an absorbent solid 6 in which an aqueous solution containing 0.04 mol / l of a strong copper salt is impregnated with an electrolyte solution, or a gel containing an electrolyte solution is sandwiched between a copper plate 7 serving as an anode and a silicon substrate serving as a cathode. The absorbent solid or gel is used as an electrolyte that mediates an electrochemical reaction, and is also used as a separator and a support for preventing a short circuit between the anode and the cathode. Therefore, the step of insulating and separating the silicon substrate from the electrolyte solution by an electrochemical cell or the like becomes unnecessary, and the evaluation can be performed easily and quickly. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0201626-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100476693-B1 |
| priorityDate | 1995-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.