| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1995-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdd0386368eaa2489f7fec1f162e0605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a283e2a43d9c4d47966eaf41e56f4394 |
| publicationDate |
1996-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08211613-A |
| titleOfInvention |
Resist composition |
| abstract |
(57) [Summary] [Object] To provide a novel radiation-sensitive resist composition. A radiation-sensitive composition comprising a resin binder containing an allyloxy group having two or more substituents as an acid labile group, (a) and a radiation-sensitive component. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9703195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014148241-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014148241-A1 |
| priorityDate |
1994-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |