http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08211600-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1995-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f28ee0195050c0998587f7e45ddd1c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_370a4a488a6dbde066a6710355ac2419 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7da8c98881b99ec8a5663dabe5c80c91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811c9e6e856f6d34daba788e2d6e8199 |
| publicationDate | 1996-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08211600-A |
| titleOfInvention | Positive resist composition |
| abstract | (57) [Summary] [Objective] To provide a positive resist composition having excellent performance such as γ value. [Structure] General formula (I) (In the formula, R and R 1 to R 6 are a hydrogen atom or a carbon number of 1 to 6 The alkyl group, R 7 is a like alkyl group having 1 to 6 carbon atoms, m and n is an integer of 1-3. ) Alkali-soluble polyphenols represented by the general formula (II) (In the formula, R 8 is a hydrogen atom or the like, and R 9 to R 11 are carbon atoms 1 to In the alkyl group of 6, etc., a to f represent an integer of 0 to 3, and at least two of b, d and f are integers of 1 to 3. ) An alkali-soluble polyhydroxy compound, an alkali-soluble novolac resin, and a 1,2-quinonediazide compound represented by the formula (1) are included. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9625812-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678876-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006059903-A1 |
| priorityDate | 1995-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 146.