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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K9-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06M17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D04H1-587
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filingDate 1995-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac17e6a93a5def757e776137bbd06239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a371b033e415cf69f6004d226610aae
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publicationDate 1996-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08209515-A
titleOfInvention Heat-resistant sheet for sputtering and its use
abstract (57) [PROBLEMS] To provide a heat-resistant sheet for sputtering, which has excellent workability, has a sufficient protective action, and is not limited in the method of use, and a method of using the same. SOLUTION: The heat-resistant sheet for spatters of the present invention is a nonwoven fabric having a basis weight of 50 to 350 g / m 2 obtained by entanglement of a fibrous web made of heat-resistant fibers with a water flow and having a water retention capacity of 5 times or more than its own weight. Yes, this heat-resistant sheet for sputtering is Use with water included.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4498029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010274318-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003064566-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006009200-A
priorityDate 1994-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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