| abstract |
(57) [Summary] [Object] To provide a positive resist composition which is particularly excellent in effective sensitivity, is free from scum, and is excellent in various properties such as heat resistance and profile. [Configuration] In the general formula (I) OHC- (CH 2) n -CO 2 R (I) [wherein, R represents hydrogen, and alkyl group having 6 or less carbon atoms, n represents 0 or more and 3 or less integer Is. ] A novolak resin obtained by condensing an aldehyde compound and an aldehyde mixture of formaldehyde and phenols in the presence of an acid catalyst, 1,2-quinonediazide compound, and an alkali-soluble polyhydric phenol compound having a molecular weight of less than 900 A positive resist composition containing: |