| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50 |
| filingDate |
1995-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92915a09c9bd556d32bf94c390d2bfe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c13dadf5001f2309790b181d1bee8204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a448025defb30396ac0ab06104eb0d6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b27bace6e5c7ecc092105c2a2a6080c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24add5165c87a13d4178dd340e98dee0 |
| publicationDate |
1996-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08194737-A |
| titleOfInvention |
Fine pattern step measuring device |
| abstract |
(57) [Abstract] [Purpose] The pattern of an etching product is measured with high precision in the dimension in the Z direction as well as the two-dimensional directions in XY. An image is input into a lead frame pattern for each minute section in the X direction and the Y direction, the distance in the Z axis direction between the lead frame and the image input means is changed, and the in-focus point is read by autofocus. Autofocus is performed at at least one location per section, the X and Y coordinate values of that point and the Z coordinate value of the in-focus point are read, and two-dimensional image data for each section and three-dimensional including coordinate values are read. CA Three-dimensional CAD with a step measuring device that converts to D data Measure downset of island 10 above. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008049370-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015143656-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014095661-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015019978-A1 |
| priorityDate |
1995-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |